MEMS and Nanotechnology for Gas Sensors Paperback Book Sunipa Roy Chandan Sarkar

In like new condition.

No spine creases or signs of use. Cover has light rub marks and small corner dings from being stored on a shelf.

White edges have a few light marks.

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Roy and Sarkar describe how using microelectromechanical systems (MEMS) for gas sensing and biosensing can reduce the power consumption of the sensors and can analyze small volumes of the gas. Looking in turn at fabrication procedure and applications, they consider such topics as a substrate for MEMS, pattern transfer with photolithography, microheaters for gas sensors, sensing with graphene, nanocrystalline zinc-oxide-based microfabricated chemical sensor, and nanostructures for volatile organic compound detection. Annotation ©2016 Ringgold, Inc., Portland, OR ()